DMSO in Photoresist-Removal Formulations
DMSO is used as a solvent in selected photoresist-removal systems. Its role is to help dissolve or remove the organic resist material after the relevant patterning operation. Successful stripping also requires the…
DMSO is used as a solvent in selected photoresist-removal systems. Its role is to help dissolve or remove the organic resist material after the relevant patterning operation. Successful stripping also requires the exposed device materials to remain acceptable after cleaning, rinsing and drying. Identify the resist and the process step A developed resist, a thick … Read more
